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| Rental service is abirable for domestic Japan |
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IR-1300 |
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You can see the state of the IC pattern clearly with an infrared light
and infrared camera from the back side of the silicon chip.
IR -1300 displays a clear image with real-time processing software (DT
enhancer)
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Characteristic
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*Support X100 objecyive lens for option. |
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*It is easy to set focus, XY stage position |
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*130Mega pixel Infrared CMOS Camera. |
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*Usability improved by the additional function of the DT enhancer software. |
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ＩＲ-1300(IR-Micro scope, NotePC with software) |
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X,Y stage |
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DT-Enhancer(real-time image enhance software) |
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The DT enhancer pressce a low contrast image to the bright clear image.
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Main function |
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-Image capture- |
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・8bit monocrome |
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-Display Image- |
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*Full screen display *Zoom display(X2-X10) |
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-Efect prsessing- |
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*Brightness proseccing *Integral processing |
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-Measure function- |
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*Scale display *Area measure * Saize measure |
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-Figure drawing- |
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*Circle *Square *Arrow *Text |
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-File management- |
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*BMP File save/load *One click save |
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*Original screen save *Origonal screen with drawing data. |
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Display image sample |
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System stracture |
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Object sample |
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Si Silicon wafer |
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IR-camera |
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130mega pixel C-MOS camera |
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InGaAs camera (option) |
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Main versatile |
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Filip chip status, Boid inspection, IC pattern check |
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Alignment mark difference measure of sandwich wafer. |
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Oxide size measure of VCSEL wafer. |
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Basic specification |
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Objective lens 5x, 10x, 20x, 50x, 100x
*IR-Light soce 50W、Reflection, Transparence, Note PC, XY manual stage,
DT-enhancer (
real time image enhance software
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Efect prosessing image sample |
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→ |
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Real image sample |
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DT-enhancer useing image sample |
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